Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

Metallic multilayers for x rays using classical thin-film theory

B. Vidal, P. Vincent · Applied Optics · 1984 · 260 citations

Natural Sciences, Materials Science, Physics +17

The scattering of x rays from nonideal multilayer structures

D. G. Stearns · Journal of Applied Physics · 1989 · 244 citations

Natural Sciences, Materials Engineering, Materials Science +17

Soft x-ray projection lithography using an x-ray reduction camera

A. M. Hawryluk, Lynn G. Seppala · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 123 citations

Engineering, Manufacturing Engineering, Microfabrication +13

Interfacial roughness correlation in multilayer films: Influence of total film and individual layer thicknesses

D. E. Savage, N. Schimke, Y. H. Phang et al. · Journal of Applied Physics · 1992 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +16

Multilayer coated reflective optics for Extreme UV lithography

E. Louis, H.-J. Voorma, N.B. Koster et al. · Microelectronic Engineering · 1995 · 52 citations

Natural Sciences, Materials Engineering, Materials Science +14