Edward L. G. Maas

Determination of the layered structure in Mo/Si multilayers by grazing incidence X-ray reflectometry

Andrey Yakshin, E. Louis, P.C. Görts et al. · Physica B Condensed Matter · 2000 · 60 citations

Natural Sciences, Materials Science, Physics +14

<title>Progress in Mo/Si multilayer coating technology for EUVL optics</title>

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 45 citations

Natural Sciences, Materials Engineering, Materials Science +17

Peak and integrated reflectivity, wavelength and gamma optimization of Mo/Si, and Mo/Be multilayer, multielement optics for extreme ultraviolet lithography

R. Stuik, E. Louis, Andrey Yakshin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1999 · 25 citations

Natural Sciences, Materials Engineering, Materials Science +17

Reflectivity of Mo/Si multilayer systems for EUVL

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 15 citations

Engineering, Materials Engineering, Materials Science +14

<title>Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability</title>

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17