Concepedia

Peter C. Goerts

PC

4

Publications

90

Citations

4

H-Index

1999

Active since

Affiliations

Physikalisch-Technische Bundesanstalt(Current)

Carl Zeiss (Germany)

Institute for Atomic and Molecular Physics

Peter C. Goerts is an author at Physikalisch-Technische Bundesanstalt specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceOptical PropertiesPhysicsThin FilmsOptoelectronicsMaterials EngineeringElectrical Engineering

Publications per year

1999–2000

4

Publications

4

<title>Progress in Mo/Si multilayer coating technology for EUVL optics</title>

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 45 citations

Materials Science, Materials Engineering, Electrical Engineering +14

<title>Multilayer reflectance during exposure to EUV radiation</title>

Sebastian Oestreich, R. Klein, Frank Scholze et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 17 citations

Short Wavelength Optic, Optical Materials, Engineering +22

Reflectivity of Mo/Si multilayer systems for EUVL

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1999 · 15 citations

Engineering, Physics, Optical Properties +11

<title>Mo/Si multilayer coating technology for EUVL: coating uniformity and time stability</title>

Eric Louis, Andrey Yakshin, Peter C. Goerts et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 13 citations

Engineering, Electron-beam Lithography, Optical Coatings +23

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