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Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation

Materials ScienceOptical MaterialsUltraviolet RadiationEngineeringOptical PropertiesSpectroscopyNatural SciencesOptical GlassPorogen Residues DetectionChemistryOptical SpectroscopyLow-k DielectricsPorous SensorUv-vis Spectroscopy