Thin Solid Films · 2010 · 53 citations · 28 references
Natural SciencesMaterials EngineeringMaterials ScienceOptical MaterialsPhotonicsSpectroscopyDielectric MaterialsDielectric PropertiesDielectric ResponseDielectricsOptical Properties Of MaterialsOptical Properties Of SolidsDielectric CharacterizationDielectric MeasurementDielectric Optical MaterialsDielectric SpectroscopyLow-k DielectricsOptical Dielectric FunctionOptical Dielectric ResponseOptical Properties
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Low dielectric constant materials for microelectronics
Karen Maex, Mikhaı̈l R. Baklanov, Denis Shamiryan et al. · Journal of Applied Physics · 2003 · 1.6K citations
Natural Sciences, Materials Engineering, Materials Science +17
Optical properties of thin films
D. E. Aspnes · Thin Solid Films · 1982 · 1.6K citations
Determination of pore size distribution in thin films by ellipsometric porosimetry
Mikhaı̈l R. Baklanov, K. P. Mogilnikov, V. G. Polovinkin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 509 citations
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