Seedlayer-less gold electroplating on silicon surface for MEMS applications - Concepedia

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Seedlayer-less gold electroplating on silicon surface for MEMS applications

21

Citations

4

References

2006

Year

Takayuki Fujita, Suguru Nakamichi, Sunao Ioku, Kazusuke Maenaka, Yoichiro Takayama

Sensors and Actuators A Physical

Materials ScienceElectrical EngineeringEngineeringMicrofabricationNanotechnologySurface ScienceSeedlayer-less GoldSilicon On InsulatorMicroelectronics

References

	Year	Citations

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