Seed Layer Formation
Seed Layer Formation is a thin-film deposition process, distinguished within atomic layer deposition and interconnect formation, in which a conductive nucleation layer is selectively deposited to enable subsequent electroplating and ensure low-resistance electrical connectivity in nanoscale semiconductor devices.
418
Publications
17.1K
Citations
2.2K
Authors
553
Institutions
Publications per year
2017–2026
97
418
Microstructural Optimization of a Zeolite Membrane for Organic Vapor Separation
Zhiping Lai, Griselda Bonilla, José Geraldo Nery et al. · Science · 2003 · 1.1K citations
Fabrication of ZnO Nanorods and Nanotubes in Aqueous Solutions
Quanchang Li, Vageesh Kumar, Yan Li et al. · Chemistry of Materials · 2005 · 628 citations
Natural Sciences, Materials Engineering, Materials Science +17
1–5 of 418
2.2K
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Central Research Institute of Electric Power Industry, Japan
5 publications · 158 citations
5
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4
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4
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1–5 of 2.2K
553

Chinese Academy of Sciences
Beijing, China
15 h-index
66 publications
2.5K citations
IMEC
Leuven, Belgium
11 h-index
96 publications
2.5K citations
Seoul National University
Seoul, South Korea
10 h-index
50 publications
2.4K citations
Nagoya University
Nagoya, Japan
8 h-index
30 publications
1.2K citations
KU Leuven
Leuven, Belgium
8 h-index
27 publications
943 citations
The University of Tokyo
Tokyo, Japan
8 h-index
13 publications
460 citations

Hanyang University
Seoul, South Korea
8 h-index
24 publications
499 citations
National Institute for Materials Science
Tsukuba, Japan
7 h-index
15 publications
714 citations
1–8 of 553
21 publications · 552 citations
17
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JES · 22 publications · 510 citations
15
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14 publications · 688 citations
14
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16 publications · 613 citations
13
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12 publications · 418 citations
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