Concepedia

Boron carbon nitride film with low dielectric constant as passivation film for high speed electronic devices

Shuichi Umeda, Tadao Yuki, Tomohiko Sugiyama, Takashi Sugino

Diamond and Related Materials · 2004 · 48 citations · 12 references

DOI

Concepts

References

12

Dramatic enhancement in the gain of a GaAs/AlGaAs heterostructure bipolar transistor by surface chemical passivation

C. J. Sandroff, R.N. Nottenburg, J.C. Bischoff et al. · Applied Physics Letters · 1987 · 722 citations

, , +17

Preparation of Semiconducting Cubic Boron Nitride

R. H. Wentorf · The Journal of Chemical Physics · 1962 · 199 citations

, , +14

A Model to Explain the Effective Passivation of the GaAs Surface by (NH<sub>4</sub>)<sub>2</sub>S<sub>x</sub> Treatment

Yasuo Nannichi, Jia-Fa Fan, Haruhiro Oigawa et al. · Japanese Journal of Applied Physics · 1988 · 186 citations

, , +17

Characterization and Field Emission of Sulfur-Doped Boron Nitride Synthesized by Plasma-Assisted Chemical Vapor Deposition

Takashi Sugino, Kazuhiko Tanioka, Seiji Kawasaki et al. · Japanese Journal of Applied Physics · 1997 · 121 citations

, , +17

Dielectric Constant of Boron Nitride Films Synthesized by Plasma-Assisted Chemical Vapor Deposition

Takashi Sugino, Tomoyoshi Tai · Japanese Journal of Applied Physics · 2000 · 71 citations

, , +17