Operational characteristics of microfabricated electric motors

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

Operation of microfabricated harmonic and ordinary side-drive motors

M. Megregany, P. Nagarkar, S.D. Senturia et al. · 2002 · 173 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

IC-processed electrostatic micro-motors

Long-Sheng Fan, Yu‐Chong Tai, R.S. Muller · 2003 · 147 citations

Engineering, Electrical Engineering, Materials Science +17

Frictional study of IC-processed micromotors

Yu‐Chong Tai, R.S. Muller · Sensors and Actuators A Physical · 1990 · 126 citations

Engineering, Materials Science, Mechanical Engineering +11

A study of three microfabricated variable-capacitance motors

Mehran Mehregany, Stephen F. Bart, Lee S. Tavrow et al. · Sensors and Actuators A Physical · 1990 · 117 citations

Engineering, Electrical Engineering, Mechanical Engineering +12