Frictional study of IC-processed micromotors

IC-processed electrostatic micromotors

Long-Shen Fan, Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 488 citations

IC-processed electrostatic synchronous micromotors

Yu‐Chong Tai, R.S. Muller · Sensors and Actuators · 1989 · 175 citations

Engineering, Electrical Engineering, Mechatronics Engineering +12

IC-processed electrostatic micro-motors

Long-Sheng Fan, Yu‐Chong Tai, R.S. Muller · 2003 · 147 citations

Engineering, Electrical Engineering, Materials Science +17

IC-processed micro-motors: design, technology, and testing

Yuan‐Chuan Tai, L.-S. Fan, R.S. Muller · 2003 · 117 citations

Engineering, Electrical Engineering, Mechanical Engineering +17