IEEE Transactions on Electron Devices · 2002 · 26 citations · 10 references
EngineeringElectrical EngineeringMicroelectronicsSemiconductor DevicesSemiconductor MaterialsDevice CharacterizationDevice ModelingDevice SimulationField-effect TransistorsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor PhysicsBreakdown VoltageField-effect Transistor SimulationJunction ModelingMetal-oxide-semiconductor Field-effect Transistor ModelingMosfet ModelingPhysics-based Device ModelingPower MosfetsSaturation
CoolMOS/sup TM/ is a novel power MOSFET with a "superjunction" for its drift region, which results in a vastly improved relationship between the on resistance and breakdown voltage. The presence of the superjunction makes the device physics very interesting and complicated. In this paper, we present simulation results aimed at understanding the device operation both in the on state and in the off state. Quasi saturation of the drain current is analyzed, and it is shown that it can be prevented by increasing the doping density of the drift region. An analytic model of the JFET-like drift region is presented. A CoolMOS/sup TM/ transistor model based on the simulation results described here will be presented in an accompanying paper.
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A new generation of high voltage MOSFETs breaks the limit line of silicon
Gerald Deboy, N. Marz, Josef Štengl et al. · 2002 · 402 citations
Engineering, Electrical Engineering, Electronic Materials +13