Enhancement of RF-MEMS switch reliability through an active anti-stiction heat-based mechanism

Jacopo Iannacci, A. Repchankova, A. Faes, Augusto Tazzoli, Gaudenzio Meneghesso, G.‐F. Dalla Betta

Microelectronics Reliability · 2010 · 29 citations · 9 references

Concepts

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