Microelectronics Reliability · 2008 · 71 citations · 14 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsMicroelectromechanical SystemsMicroelectronicsDielectric MaterialsDielectric PropertiesDielectricsMems ReliabilityMems SwitchesRf MemsCapacitive Mems SwitchesCapacitive Rf Mems SwitchesDielectric ChargingRf Mems ReliabilityRf Mems Switches
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