Microelectronic Engineering · 2013 · 10 citations · 1 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsNanomaterialsNanotechnologyCmos Circuit DesignDevice CharacterizationElectron Beam LithographyNanoelectronicsNanomaterial CharacterizationSurface MicroscopyAtomic-scale Surface ImagingCmos Fabrication ProcessesCmos ScalingHigh-resolution Surface ImagingNanometer-scale MetrologyNanotopographyScanning Electron Microscopy Surface Analysis
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