Concepedia
Statistics
Publications
4
Citations
125
H-Index
Active since
2005
Affiliations
STMicroelectronics (France)(Current)
Institut polytechnique de Grenoble
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Université Grenoble Alpes
CEA Grenoble
S. Gaillard is an author at STMicroelectronics (France) specializing in engineering, materials science, and semiconductor thin films.
Publications per year
2005–2013
Fully-depleted SOI technology using high-k and single-metal gate for 32 nm node LSTP applications featuring 0.179 μm<sup>2</sup> 6T-SRAM bitcell
C. Fenouillet-Béranger, J. Todeschini, Jean-Christophe Le-Denmat et al. · 2007 · 61 citations
Engineering, Computer Engineering, Electrical Engineering +15
Epitaxial growth of LaAlO3 on Si(001) using interface engineering
Clément Merckling, Gabriel Delhaye, S. Gaillard et al. · Microelectronics Reliability · 2007 · 32 citations
Engineering, Materials Engineering, Materials Science +14
LaAlO3 films prepared by MBE on LaAlO3(001) and Si(001) substrates
S. Gaillard, Y. Rozier, Clément Merckling et al. · Microelectronic Engineering · 2005 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +12
High resolution nanotopography characterization at die scale of 28nm FDSOI CMOS front-end CMP processes
Florent Dettoni, M. Rivoire, S. Gaillard et al. · Microelectronic Engineering · 2013 · 10 citations
Engineering, Electrical Engineering, Materials Science +16
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