Compatibility between bipolar readout electronics and microstructures in silicon

Study of electrochemical etch-stop for high-precision thickness control of silicon membranes

B. Kloeck, Scott D. Collins, N. F. de Rooij et al. · IEEE Transactions on Electron Devices · 1989 · 209 citations

Engineering, Materials Engineering, Materials Science +17

Sensors with digital or frequency output

S. Middelhoek, P.J. French, Johan H. Huijsing et al. · Sensors and Actuators · 1988 · 113 citations

Engineering, Electrical Engineering, Analog Electronics +11

Residual stress and mechanical properties of boron-doped p+-silicon films

Xiaoyi Ding, Wen H. Ko, Joseph M. Mansour · Sensors and Actuators A Physical · 1990 · 99 citations

Natural Sciences, Materials Engineering, Materials Science +16

Smart sensors

J.M. Giachino · Sensors and Actuators · 1986 · 64 citations

Engineering, Computer Engineering, Electrical Engineering +17

Signal conditioning on the sensor chip

Johan H. Huijsing · Sensors and Actuators · 1986 · 40 citations

Engineering, Electrical Engineering, Analog Electronics +13