Measurement and simulation of impinging precursor molecule distribution in focused particle beam deposition/etch systems

Observation and characteristics of mechanical vibration in three-dimensional nanostructures and pillars grown by focused ion beam chemical vapor deposition

Jun‐ichi Fujita, M. Ishida, Toshitsugu Sakamoto et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2001 · 104 citations

Natural Sciences, Materials Engineering, Materials Science +15

Focused ion beam fabrication of submicron gold structures

Patricia G. Blauner, Jae Sang Ro, Y. Butt et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 74 citations

Engineering, Materials Engineering, Materials Science +17

The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor

Miyoko Tanaka, M. Shimojo, Kazutaka Mitsuishi et al. · Applied Physics A · 2004 · 57 citations

Natural Sciences, Materials Science, Physics +10

Electron beam decomposition of carbonyls on silicon

Volker Scheuer, Hans W. P. Koops · Microelectronic Engineering · 1986 · 49 citations

Natural Sciences, Chemistry, Materials Science +8

E-beam induced X-ray mask repair with optimized gas nozzle geometry

K. Kohlmann, Matthias Thiemann, W. H. Brünger · Microelectronic Engineering · 1991 · 45 citations

Engineering, Radiology, Radiation Protection +9