W. H. Brünger

Statistics

Publications

Citations

253

H-Index

Active since

1989

Affiliations

Fraunhofer Institute for Silicon Technology(Current)

Fraunhofer Institute for Microengineering and Microsystems

W. H. Brünger is an author at Fraunhofer Institute for Silicon Technology specializing in materials engineering, materials science, and natural sciences.

Publications per year

1989–2009

Publications

Resolution limits in electron-beam induced tungsten deposition

K. T. Kohlmann-von Platen, J. Chlebek, K. Reimer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +12

Electron-beam induced tungsten deposition: Growth rate enhancement and applications in microelectronics

K. T. Kohlmann-von Platen, Leandro Buchmann, H.-C. Petzold et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 60 citations

Engineering, Materials Engineering, Materials Science +15

E-beam induced X-ray mask repair with optimized gas nozzle geometry

K. Kohlmann, Matthias Thiemann, W. H. Brünger · Microelectronic Engineering · 1991 · 45 citations

Engineering, Radiology, Radiation Protection +9

Spatial resolution tests of scanning Auger microscopy under different topographical conditions

A. Umbach, W. H. Brünger · Surface and Interface Analysis · 1989 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

Determination of Cross-Link Density in Ion-Irradiated Polystyrene Surfaces from Rippling

Yogesh Karade, Sascha A. Pihan, W. H. Brünger et al. · Langmuir · 2009 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17

1–5 of 7