Concepedia
Microelectronic Engineering · 1986 · 49 citations · 5 references
Natural SciencesChemistryMaterials ScienceInorganic ChemistryMaterials ChemistrySurface ScienceElectron Beam PhysicsSilicon MaterialsSilicon Carbide (Sic) MaterialsSilicon ChemistrySilicon Oxidation
5
Formation of Thin Polymer Films by Electron Bombardment
Robert W. Christy · Journal of Applied Physics · 1960 · 180 citations
Natural Sciences, Materials Engineering, Materials Science +15
New selective deposition technology by electron-beam induced surface reaction
Shinji Matsui, Katsumi Mori · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 141 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17
Materials and techniques used in nanostructure fabrication
W. W. Molzen, A. N. Broers, J. J. Cuomo et al. · Journal of Vacuum Science and Technology · 1979 · 48 citations
Engineering, Materials Engineering, Materials Science +14
Analysis of thin films arising from electron-, ion- and photon-beam-induced decomposition of Cr(CO)6 and Al(CH3)3
Richard W. Bigelow, Jerry G. Black, C. B. Duke et al. · Thin Solid Films · 1982 · 25 citations
Natural Sciences, Chemistry, Materials Science +9
Electron beam decomposition of CdCl2
Mino Green, Olaosebikan A. Fakolujo · Journal of Applied Physics · 1985 · 12 citations