Analysis of thin films arising from electron-, ion- and photon-beam-induced decomposition of Cr(CO)6 and Al(CH3)3 - Concepedia

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Analysis of thin films arising from electron-, ion- and photon-beam-induced decomposition of Cr(CO)6 and Al(CH3)3

25

Citations

38

References

1982

Year

Richard W. Bigelow, Jerry G. Black, C. B. Duke, W. R. Salaneck, H. R. Thomas

Thin Solid Films

Materials ScienceMaterial AnalysisEngineeringPhoton-beam-induced DecompositionSurface ScienceApplied PhysicsChemistryThin FilmsThin Film Processing

References

	Year	Citations

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