Vinzenz Friedli

Optimized molecule supply from nozzle-based gas injection systems for focused electron- and ion-beam induced deposition and etching: simulation and experiment

Vinzenz Friedli, Ivo Utke · Journal of Physics D Applied Physics · 2009 · 90 citations

High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with<i>In Situ</i>AFM

J. A. Whitby, Fredrik Östlund, Péter Horváth et al. · Advances in Materials Science and Engineering · 2011 · 81 citations · Full text

Microscopy, Biological Mass Spectrometry, Ion Beam Instrumentation +17

Resolution in focused electron- and ion-beam induced processing

Ivo Utke, Vinzenz Friedli, Martin Purrucker et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 60 citations · Full text

Adsorption Rate Model, Engineering, Electron-beam Lithography +16

Density determination of focused-electron-beam-induced deposits with simple cantilever-based method

Ivo Utke, Vinzenz Friedli, Johann Michler et al. · Applied Physics Letters · 2006 · 44 citations · Full text

Materials Science, Engineering, Electron Microscopy +13

Local electron beam induced reduction and crystallization of amorphous titania films

Philippe Kern, Christian J. Jäggi, Ivo Utke et al. · Applied Physics Letters · 2006 · 33 citations · Full text

Materials Science, Material Analysis, Engineering +13