Patricia G. Blauner

X-ray mask repair with focused ion beams

Alfred Wagner, James P. Levin, J. L. Mauer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 76 citations

Natural Sciences, Materials Science, Physics +17

Focused ion beam fabrication of submicron gold structures

Patricia G. Blauner, Jae Sang Ro, Y. Butt et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 74 citations

Engineering, Materials Engineering, Materials Science +17

Focused ion beam induced deposition of low-resistivity gold films

Patricia G. Blauner, Y. Butt, Jae Sang Ro et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +16

Electromigration failure due to interfacial diffusion in fine Al alloy lines

C-K. Hu, M. B. Small, Kenneth P. Rodbell et al. · Applied Physics Letters · 1993 · 42 citations

Engineering, Materials Engineering, Materials Science +16

Focused ion beam imaging of grain growth in copper thin films

J. Gupta, J. M. E. Harper, J. L. Mauer et al. · Applied Physics Letters · 1992 · 41 citations

Natural Sciences, Materials Engineering, Materials Science +17