J. L. Mauer

Mechanism of silicon etching by a CF4 plasma

J. L. Mauer, J. S. Logan, L. B. Zielinski et al. · Journal of Vacuum Science and Technology · 1978 · 98 citations

Materials Science, Engineering, Physics +13

X-ray mask repair with focused ion beams

Alfred Wagner, James P. Levin, J. L. Mauer et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1990 · 76 citations

Ion Implantation, Health Sciences, Ophthalmology +10

A variable-stress shallow trench isolation (STL) technology with diffused sidewall doping for submicron CMOS

B. Davari, Charles W. Koburger, T. Furukawa et al. · 2003 · 57 citations

Engineering, Vlsi Design, Submicron Cmos +17

A new planarization technique, using a combination of RIE and chemical mechanical polish (CMP)

B. Davarik, Charles W. Koburger, R. Schulz et al. · 2003 · 55 citations

Engineering, Emerging Memory Technology, Mechanical Engineering +22

Measurement of Total Inelastic Cross Sections for Electron Impact in N2 and CO2

David J. Spence, J. L. Mauer, G. J. Schulz · The Journal of Chemical Physics · 1972 · 45 citations · Full text

Engineering, Nuclear Physics, Measurement +18