J. S. Logan

Stabilization of SiO₂ Passivation Layers with P₂O₅

D. R. Kerr, J. S. Logan, P. J. Burkhardt et al. · IBM Journal of Research and Development · 1964 · 121 citations

Semiconductors, Npn Silicon Transistors, Electrical Engineering +8

Mechanism of silicon etching by a CF4 plasma

J. L. Mauer, J. S. Logan, L. B. Zielinski et al. · Journal of Vacuum Science and Technology · 1978 · 98 citations

Materials Science, Engineering, Physics +13

Copper deposition by electron cyclotron resonance plasma

W. M. Holber, J. S. Logan, H. J. Grabarz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 84 citations

Electrical Engineering, Copper Deposition, Engineering +13

Control of RF Sputtered Film Properties Through Substrate Tuning

J. S. Logan · IBM Journal of Research and Development · 1970 · 62 citations

Materials Science, Electrical Engineering, Engineering +15

A VLSI Bipolar Metallization Design with Three-Level Wiring and Area Array Solder Connections

L. J. Fried, J. Havas, J. S. Lechaton et al. · IBM Journal of Research and Development · 1982 · 57 citations

Engineering, Integrated Circuits, Three-level Wiring +18