Concepedia

H. J. Grabarz

HJ

Statistics

Publications

1

Citations

84

H-Index

1

Active since

1993

Affiliations

IBM Research - Thomas J. Watson Research Center(Current)

H. J. Grabarz is an author at IBM Research - Thomas J. Watson Research Center specializing in plasma deposition, thin-film deposition, and semiconductor devices.

Publications per year

1993–1993

1

Publications

1

Copper deposition by electron cyclotron resonance plasma

W. M. Holber, J. S. Logan, H. J. Grabarz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 84 citations

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