W. M. Holber

Ion energetics in electron cyclotron resonance discharges

W. M. Holber, John Forster · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 112 citations

Engineering, Electrical Engineering, Microelectronics +9

Copper deposition by electron cyclotron resonance plasma

W. M. Holber, J. S. Logan, H. J. Grabarz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 84 citations

Natural Sciences, Electrical Engineering, Physics +16

GaAs-oxide removal using an electron cyclotron resonance hydrogen plasma

Zhaoming Lu, Michael Schmidt, D. Chen et al. · Applied Physics Letters · 1991 · 54 citations

Natural Sciences, Materials Science, Physics +15

Plasma characterization for a divergent field electron cyclotron resonance source

John Forster, W. M. Holber · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 43 citations

Natural Sciences, Electrical Engineering, Physics +15

Doppler profile measurement of Ar and Ar+ translational energies in a divergent magnetic field electron cyclotron resonance source

John S. McKillop, John Forster, W. M. Holber · Applied Physics Letters · 1989 · 34 citations

Natural Sciences, Physics, Optics +9