W. M. Holber

Ion energetics in electron cyclotron resonance discharges

W. M. Holber, John Forster · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 111 citations

Electrical Engineering, Ion Energy Distributions, Engineering +10

Copper deposition by electron cyclotron resonance plasma

W. M. Holber, J. S. Logan, H. J. Grabarz et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 84 citations

Electrical Engineering, Copper Deposition, Engineering +13

GaAs-oxide removal using an electron cyclotron resonance hydrogen plasma

Zhaoming Lu, Michael Schmidt, D. Chen et al. · Applied Physics Letters · 1991 · 54 citations

Chemical Engineering, Electrical Engineering, Engineering +11

Plasma characterization for a divergent field electron cyclotron resonance source

John Forster, W. M. Holber · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 43 citations

Langmuir Probe, Electrical Engineering, Plasma Uniformity +11

Doppler profile measurement of Ar and Ar+ translational energies in a divergent magnetic field electron cyclotron resonance source

John S. McKillop, John Forster, W. M. Holber · Applied Physics Letters · 1989 · 34 citations

Engineering, Magnetic Resonance, Relativistic Plasma +20