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Energetiq Technology (United States)

ET

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Publications

68

Citations

1.2K

Authors

10

Location

Woburn, United States

Energetiq Technology (United States) is a company institution in Woburn, United States known for photonics, engineering, and optoelectronics.

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Publications

68

20 years of research on the Alcator C-Mod tokamak

M. Greenwald, A. Bader, S. G. Baek et al. · Physics of Plasmas · 2014 · 125 citations · Full text

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Ultrabroadband Nanospectroscopy with a Laser-Driven Plasma Source

Martin Wagner, Devon S. Jakob, S. Horne et al. · ACS Photonics · 2018 · 34 citations

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Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development

Stephen F. Horne, Matthew M. Besen, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 28 citations

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Extreme-ultraviolet light source development to enable pre-production mask inspection

M. Partlow, Matthew M. Besen, Paul A. Blackborow et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 27 citations

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A novel high-brightness broadband light-source technology from the VUV to the IR

Stephen F. Horne, Don Smith, Matthew M. Besen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 24 citations

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1–5 of 68

Authors

10

  1. SF
    Stephen F. Horne

    Energetiq Technology (United States), United States

    19 publications · 173 citations

    8

    h-index

  2. DK
    Donald K. Smith

    Energetiq Technology (United States), United States

    59 publications · 367 citations

    8

    h-index

  3. MM
    Matthew M. Besen

    Energetiq Technology (United States), United States

    21 publications · 397 citations

    8

    h-index

  4. PA
    Paul A. Blackborow

    Energetiq Technology (United States), United States

    19 publications · 140 citations

    6

    h-index

  5. MP
    M. Partlow

    Energetiq Technology (United States), United States

    27 publications · 201 citations

    6

    h-index

1–5 of 10