Matthew M. Besen

Energy Confinement of High-Density Pellet-Fueled Plasmas in the Alcator<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>C</mml:mi></mml:math>Tokamak

M. Greenwald, D. Gwinn, S. L. Milora et al. · Physical Review Letters · 1984 · 251 citations

Natural Sciences, Nuclear Engineering, Physics +17

Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development

Stephen F. Horne, Matthew M. Besen, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 28 citations

Natural Sciences, Electrical Engineering, Physics +17

Extreme-ultraviolet light source development to enable pre-production mask inspection

M. Partlow, Matthew M. Besen, Paul A. Blackborow et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 27 citations

Engineering, Electrical Engineering, Optics +10

A novel high-brightness broadband light-source technology from the VUV to the IR

Stephen F. Horne, Don Smith, Matthew M. Besen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 24 citations

Engineering, Materials Science, Physics +17

Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist

Paul A. Blackborow, Deborah Gustafson, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Engineering, Electrical Engineering, Analytical Chemistry +7