Concepedia

Deborah Gustafson

DG

Statistics

Publications

2

Citations

38

H-Index

2

Active since

2007

Affiliations

Energetiq Technology (United States)(Current)

Deborah Gustafson is an author at Energetiq Technology (United States) specializing in engineering, electrical engineering, and photonics.

Publications per year

2007–2012

2

Publications

2

Extreme-ultraviolet light source development to enable pre-production mask inspection

M. Partlow, Matthew M. Besen, Paul A. Blackborow et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 27 citations

, , +10

Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist

Paul A. Blackborow, Deborah Gustafson, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

, , +7

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