Paul A. Blackborow

Application of a high-brightness electrodeless Z-pinch EUV source for metrology, inspection, and resist development

Stephen F. Horne, Matthew M. Besen, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 28 citations

Natural Sciences, Electrical Engineering, Physics +17

Extreme-ultraviolet light source development to enable pre-production mask inspection

M. Partlow, Matthew M. Besen, Paul A. Blackborow et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 27 citations

Engineering, Electrical Engineering, Optics +10

Surface Characteristics of Monocrystalline ß-SiC dry etched in fluorinated gases

John W. Palmour, R. F. Davis, P. J. Astell-Burt et al. · MRS Proceedings · 1986 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +13

Application of the Energetiq EQ-10 electrodeless Z-Pinch EUV light source in outgassing and exposure of EUV photoresist

Paul A. Blackborow, Deborah Gustafson, Donald K. Smith et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Engineering, Electrical Engineering, Analytical Chemistry +7