Concepedia

P. J. Burkhardt

PJ

7

Publications

369

Citations

7

H-Index

1964

Active since

Affiliations

IBM (United States)(Current)

P. J. Burkhardt is an author at IBM (United States) specializing in applied physics, engineering, and electrical engineering.

Top concepts

EngineeringApplied PhysicsSurface ScienceElectrical EngineeringPhysicsThin FilmsSemiconductorsMaterial ScienceMicroelectronicsChemical Engineering

Publications per year

1964–1983

7

Publications

7

Stabilization of SiO<sub>2</sub> Passivation Layers with P<sub>2</sub>O<sub>5</sub>

D. R. Kerr, J. S. Logan, P. J. Burkhardt et al. · IBM Journal of Research and Development · 1964 · 121 citations

Semiconductors, Npn Silicon Transistors, Electrical Engineering +8

Thermal Expansion of Sputtered Silicon Nitride Films

P. J. Burkhardt, R. F. Marvel · Journal of The Electrochemical Society · 1969 · 66 citations

Engineering, Physics, Applied Physics +5

Tracer Evaluation of Hydrogen in Steam-Grown SiO[sub 2] Films

P. J. Burkhardt · Journal of The Electrochemical Society · 1967 · 49 citations

Chemical Engineering, Tritium Species, Engineering +12

Dielectric relaxation in thermally grown SiO<sub>2</sub>films

P. J. Burkhardt · IEEE Transactions on Electron Devices · 1966 · 41 citations

Orientation dependence of built-in surface charge on thermally oxidized Silicon

P. Balk, P. J. Burkhardt, L. V. Gregor · Proceedings of the IEEE · 1965 · 37 citations

Materials Science, Electrical Engineering, Engineering +6

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