Concepedia
1
Publications
66
Citations
H-Index
1969
Active since
Affiliations
IBM (United States)(Current)
R. F. Marvel is an author at IBM (United States) specializing in engineering, applied physics, and thin films.
Top concepts
PhysicsThin FilmsEngineeringApplied PhysicsMicroelectronics
Publications per year
1969–1969
Thermal Expansion of Sputtered Silicon Nitride Films
P. J. Burkhardt, R. F. Marvel · Journal of The Electrochemical Society · 1969 · 66 citations
Engineering, Physics, Applied Physics +5
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