Orientation dependence of built-in surface charge on thermally oxidized Silicon - Concepedia

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Orientation dependence of built-in surface charge on thermally oxidized Silicon

37

Citations

7

References

1965

Year

P. Balk, P. J. Burkhardt, L. V. Gregor

Proceedings of the IEEE

Materials ScienceElectrical EngineeringEngineeringSurface AnalysisSurface ScienceApplied PhysicsElectronic PackagingSilicon On InsulatorOrientation Dependence

References

	Year	Citations

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