A microaccelerometer structure fabricated in silicon-on-insulator using a focused ion beam process

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Surface micromachined accelerometers

B.E. Boser, Roger T. Howe · IEEE Journal of Solid-State Circuits · 1996 · 286 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Electrostatically driven vacuum-encapsulated polysilicon resonators Part I. Design and fabrication

R. Legtenberg, H.A.C. Tilmans · Sensors and Actuators A Physical · 1994 · 216 citations · Full text

Engineering, Electrical Engineering, Materials Science +12

SOI 'SIMOX'; from bulk to surface micromachining, a new age for silicon sensors and actuators

B. Diem, Patrice Rey, S. Renard et al. · Sensors and Actuators A Physical · 1995 · 93 citations

Engineering, Materials Engineering, Materials Science +16

Characterization of a high-sensitivity micromachined tunneling accelerometer with micro-g resolution

Cheng‐Hsien Liu, A.M. Barzilai, J. K. Reynolds et al. · Journal of Microelectromechanical Systems · 1998 · 87 citations

Engineering, Electrical Engineering, Mechanical Engineering +17