Concepedia

TPMS (tire-pressure monitoring system) sensors: Monolithic integration of surface-micromachined piezoresistive pressure sensor and self-testable accelerometer

Changzheng Wei, Wei Zhou, Quan Wang, Xiaoyuan Xia, Xinxin Li

Microelectronic Engineering · 2011 · 56 citations · 9 references

References

9

Surface micromachining for microsensors and microactuators

Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 255 citations

Engineering, Materials Engineering, Materials Science +17

A simulation program for the sensitivity and linearity of piezoresistive pressure sensors

Liwei Lin, Huey-Chi Chu, Yen‐Wen Lu · Journal of Microelectromechanical Systems · 1999 · 134 citations

Engineering, Materials Engineering, Materials Science +17

Surface micromachined pressure transducers

H. Guckel · Sensors and Actuators A Physical · 1991 · 129 citations

Engineering, Materials Science, Mechanical Engineering +12

Silicon micromechanics: sensors and actuators on a chip

Roger T. Howe, R. Müller, William S. Trimmer · IEEE Spectrum · 1990 · 110 citations

Engineering, Electrical Engineering, Mechanical Engineering +12

Silicon micromechanics: sensors and actuators on a chip

Microelectronics Reliability · 1992 · 107 citations

Engineering, Electrical Engineering, Mechanical Engineering +12