Concepedia

Silicon micromechanics: sensors and actuators on a chip

Unknown author(s)

Microelectronics Reliability · 1992 · 107 citations · 0 references

Concepts

EngineeringElectrical EngineeringMechanical EngineeringActuatorsMicroelectromechanical SystemsSensorsMechanical SensorsMems ActuatorsMems DesignMems SensorsMicroelectromechanical SensorsMicromachiningMicromachined SensorsMicromechanicsSilicon