Single crystalline CoSi2 layers formed by Co implantation into Si

Mesotaxy: Single-crystal growth of buried CoSi2 layers

Alice E. White, K. T. Short, R. C. Dynes et al. · Applied Physics Letters · 1987 · 413 citations

Natural Sciences, Materials Engineering, Materials Science +11

Formation of thin films of CoSi2: Nucleation and diffusion mechanisms

F. M. d’Heurle, C. S. Petersson · Thin Solid Films · 1985 · 211 citations

Natural Sciences, Materials Science, Physics +14

Microstructure of heteroepitaxial Si/CoSi2/Si formed by Co implantation into (100) and (111) Si

C. W. T. Bulle‐Lieuwma, A. H. van Ommen, L.J. van IJzendoorn · Applied Physics Letters · 1989 · 87 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Kinetics of CoSi2 from evaporated silicon

C.‐D. Lien, M.−A. Nicolet, S. S. Lau · Applied Physics A · 1984 · 81 citations

Natural Sciences, Chemistry, Materials Science +10

Synthesis of heteroepitaxial Si/CoSi2/Si structures by Co implantation into Si

A. H. van Ommen, J. J. M. Ottenheim, A. M. L. Theunissen et al. · Applied Physics Letters · 1988 · 75 citations

Engineering, Materials Engineering, Materials Science +13