A. M. L. Theunissen

Synthesis of heteroepitaxial Si/CoSi2/Si structures by Co implantation into Si

A. H. van Ommen, J. J. M. Ottenheim, A. M. L. Theunissen et al. · Applied Physics Letters · 1988 · 75 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Ion beam synthesis of heteroepitaxial Si/CoSi2/Si structures

A. H. van Ommen, C. W. T. Bulle‐Lieuwma, J. J. M. Ottenheim et al. · Journal of Applied Physics · 1990 · 70 citations

Materials Science, Ion Implantation, Buried Layers +12

Hydrogenation during thermal nitridation of silicon dioxide

A. E. T. Kuiper, M. F. C. Willemsen, A. M. L. Theunissen et al. · Journal of Applied Physics · 1986 · 40 citations · Full text

Engineering, Thermal Nitridation, Nitrogen Profiles +20

Germanium diffusion and strain relaxation in Si/Si1−xGex/Si structures

G. F. A. van de Walle, L.J. van IJzendoorn, A. A. van Gorkum et al. · Thin Solid Films · 1989 · 34 citations

Materials Engineering, Engineering, Physics +6

Diffusion of ion-implanted As in TiSi2

A. H. van Ommen, H. J. W. van Houtum, A. M. L. Theunissen · Journal of Applied Physics · 1986 · 28 citations

Materials Science, Tisi2 Films, Ion Implantation +13