J. J. M. Ottenheim

Synthesis of heteroepitaxial Si/CoSi2/Si structures by Co implantation into Si

A. H. van Ommen, J. J. M. Ottenheim, A. M. L. Theunissen et al. · Applied Physics Letters · 1988 · 75 citations

Materials Science, Materials Engineering, Electrical Engineering +14

Ion beam synthesis of heteroepitaxial Si/CoSi2/Si structures

A. H. van Ommen, C. W. T. Bulle‐Lieuwma, J. J. M. Ottenheim et al. · Journal of Applied Physics · 1990 · 70 citations

Materials Science, Ion Implantation, Buried Layers +12

Microstructure of buried CoSi2 layers formed by high-dose Co implantation into (100) and (111) Si substrates

C. W. T. Bulle‐Lieuwma, A. H. van Ommen, D. E. W. Vandenhoudt et al. · Journal of Applied Physics · 1991 · 34 citations

Engineering, Buried Cosi2 Layers, Silicon On Insulator +18

Ion beam synthesis of cobalt silicide: effect of implantation temperature

E.H.A. Dekempeneer, J. J. M. Ottenheim, D. E. W. Vandenhoudt et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1991 · 33 citations

Materials Science, Ion Implantation, Engineering +4

Single crystalline CoSi2 layers formed by Co implantation into Si

A. H. van Ommen, J. J. M. Ottenheim, C. W. T. Bulle‐Lieuwma et al. · Applied Surface Science · 1989 · 27 citations

Materials Science, Engineering, Co Implantation +5