Spatial Distribution Measurement of Microwave Electric Field Using Thermal Sensitive Paper in a Microwave Etching System

Abstract

A method for 2-D measurement of microwave electric field distribution using thermal sensitive paper has been developed. This measurement method has little influence on the microwave propagation and the plasma generation. In a cavity-resonator microwave plasma generation system, the relationship between the plasma uniformity and the microwave electric field distribution was investigated using this method. The cavity-resonator microwave plasma source was found to generate high-density plasma stably and uniformly over a large area through the excitation of a ring-shaped microwave electric field in the cavity resonator.