S. M. Gorbatkin - Concepedia

Author

S. M. Gorbatkin

Oak Ridge National Laboratory

Also Known As

S. Gorbatkin, S. M. Gorbatkin, S.M. Gorbatkin

Publications

Citations

H-Index

Concepts

All Affiliations

Oak Ridge National Laboratory University of Illinois Urbana-Champaign IBM (United States)Rice University

About

S. M. Gorbatkin is an author at Oak Ridge National Laboratory specializing in engineering, applied physics, and physics.

Top Concepts

#	Concept	H-Index	Publications	Citations
1	Engineering	15	20	896
2	Applied Physics	14	18	855
3	Chemistry	5	5	161
4	Natural Sciences	4	4	148
5	Chemical Engineering	1	1	22

S. M. Gorbatkin

Publications

896

Citations

H-Index

Page 1

	Year	Citations
Optical functions of chemical vapor deposited thin-film silicon determined by spectroscopic ellipsometry G. E. Jellison, M. F. Chisholm, S. M. Gorbatkin Applied Physics Letters Optical MaterialsEngineeringEllipsometry DataOptoelectronic DevicesIntegrated Circuits	1993	246
Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si films D. Lubben, Scott A. Barnett, Kazuhiro Suzuki, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Si FilmsPrimary Ion DepositionEngineeringLaser-plasma InteractionLaser Applications	1985	127
Behavior of Ar plasmas formed in a mirror field electron cyclotron resonance microwave ion source S. M. Gorbatkin, L. A. Berry, J. B. Roberto Journal of Vacuum Science & Technology A Vacuum Surfaces and Films EngineeringPlasma SciencePlasma PhysicsPlasma ElectronicsLaser Plasma Physics	1990	102
Nanoindentation and Nanoscratching of Hard Coating Materials for Magnetic Disks Ting Y. Tsui, George M. Pharr, W. C. Oliver, MRS Proceedings Materials ScienceMagnetismEngineeringNanomaterialsNanotechnology	1994	42
UV-laser photolysis of trimethylaluminum for Al film growth Teruaki Motooka, S. M. Gorbatkin, D. Lubben, Journal of Applied Physics Optical MaterialsEngineeringPhotochemistryKrf Laser IrradiationOptical Properties	1985	40
Mechanisms of Al film growth by ultraviolet laser photolysis of trimethylaluminum Teruaki Motooka, S. M. Gorbatkin, D. Lubben, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Aluminium NitrideOptical MaterialsEngineeringLaser ApplicationsVacuum Device	1986	40
The role of ion/surface interactions and photo-induced reactions during film growth from the vapor phase J. E. Greene, Teruaki Motooka, J.‐E. Sundgren, Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms EngineeringPhotochemistryVapor PhaseSurface ScienceApplied Physics	1987	38
Cu metallization using a permanent magnet electron cyclotron resonance microwave plasma/sputtering hybrid system S. M. Gorbatkin, D. B. Poker, Robert L. Rhoades, Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena EngineeringPlasma ScienceMagnetismPlasma ElectronicsMetallic Functional Material	1996	37
Hard boron–suboxide-based films deposited in a sputter-sourced, high-density plasma deposition system C. Doughty, S. M. Gorbatkin, Ting Y. Tsui, Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Materials ScienceThin Film PhysicsBoron NitrideEngineeringRadio Frequency	1997	35
Hard boron oxide thin-film deposition using electron cyclotron resonance microwave plasmas S. M. Gorbatkin, Robert L. Rhoades, Ting Y. Tsui, Applied Physics Letters Materials EngineeringMaterials ScienceBoron DownstreamPure BoronEngineering	1994	31

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