S. M. Gorbatkin

Optical functions of chemical vapor deposited thin-film silicon determined by spectroscopic ellipsometry

G. E. Jellison, M. F. Chisholm, S. M. Gorbatkin · Applied Physics Letters · 1993 · 246 citations

Optical Materials, Engineering, Ellipsometry Data +19

Laser-induced plasmas for primary ion deposition of epitaxial Ge and Si films

D. Lubben, Scott A. Barnett, Kazuhiro Suzuki et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 127 citations

Si Films, Primary Ion Deposition, Engineering +16

Behavior of Ar plasmas formed in a mirror field electron cyclotron resonance microwave ion source

S. M. Gorbatkin, L. A. Berry, J. B. Roberto · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 102 citations

Engineering, Plasma Science, Plasma Physics +16

Nanoindentation and Nanoscratching of Hard Coating Materials for Magnetic Disks

Ting Y. Tsui, George M. Pharr, W. C. Oliver et al. · MRS Proceedings · 1994 · 42 citations

Materials Science, Magnetism, Engineering +8

UV-laser photolysis of trimethylaluminum for Al film growth

Teruaki Motooka, S. M. Gorbatkin, D. Lubben et al. · Journal of Applied Physics · 1985 · 40 citations

Optical Materials, Engineering, Photochemistry +14