Microfabricated ultrasensitive piezoresistive cantilevers for torque magnetometry

Microfabrication of cantilever styli for the atomic force microscope

T. R. Albrecht, S. Akamine, Thomas E. Carver et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 743 citations

Engineering, Materials Engineering, Materials Science +17

Atomic resolution with an atomic force microscope using piezoresistive detection

M. Tortonese, R. C. Barrett, C. F. Quate · Applied Physics Letters · 1993 · 639 citations

Engineering, Materials Science, Physics +17

Piezoresistance effect of silicon

Yozo Kanda · Sensors and Actuators A Physical · 1991 · 391 citations

Natural Sciences, Materials Engineering, Materials Science +7

Formation of silicon tips with <1 nm radius

R. B. Marcus, T. S. Ravi, T. J. Gmitter et al. · Applied Physics Letters · 1990 · 261 citations

Engineering, Materials Engineering, Materials Science +14

<title>Advanced silicon etching using high-density plasmas</title>

Jy Bhardwaj, Huma Ashraf · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 232 citations

Engineering, Materials Engineering, Materials Science +17