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Silicon lifetime enhancement by SiNx:H anti-reflective coating deposed by PECVD using SiH4 and N2 reactive gas

25

Citations

14

References

2012

Year

References

YearCitations

1996

1.6K

2003

309

2009

168

1955

134

2008

122

2001

67

2000

46

2009

41

2007

38

2010

28

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