Silicon lifetime enhancement by SiNx:H anti-reflective coating deposed by PECVD using SiH4 and N2 reactive gas

R. Bousbih, Wissem Dimassi, Ikbel Haddadi, Sonia Ben Slema, P. Rava, Hatem Ezzaouia

Solar Energy · 2012 · 25 citations · 14 references

Concepts

References

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