Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon - Concepedia

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Study of the composition of hydrogenated silicon nitride SiNx:H for efficient surface and bulk passivation of silicon

DOI Full Paper Access

168

Citations

28

References

2009

Year

J.‐F. Lelièvre, Erwann Fourmond, A. Kaminski, O. Palais, D. Ballutaud, M. Lemiti

Solar Energy Materials and Solar Cells

Chemical EngineeringEngineeringEfficient SurfaceBulk PassivationSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationSilicon On InsulatorSemiconductor Device

References

	Year	Citations

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