Fourier transform infrared spectroscopy of annealed silicon-rich silicon nitride thin films

Abstract

A correlation between bonding changes in silicon-rich silicon nitride films, subjected to high temperature annealing under N2 ambient, and the formation of silicon nanocrystals is presented. The postannealing appearance of a shoulder between 1000 and 1100 cm−1 in the Fourier transform infrared (FTIR) spectra of silicon-rich silicon nitride films is attributed to a reordering in the films toward an increased SiN4 bonding configuration resulting from the precipitation of silicon nanocrystals. The FTIR monitoring of bonding changes in these films allows for the indirect verification of silicon nanocrystal formation.