Formation, etching and electrical characterization of a thermally grown gallium oxide on the Ga-face of a bulk GaN substrate

Yi Zhou, Claude Ahyi, Tamara Isaacs‐Smith, Michael J. Bozack, Chin‐Che Tin, John R. Williams, Minseo Park, An-Jen Cheng, Jung‐Hyun Park, Dong‐Joo Kim,

Solid-State Electronics · 2007 · 73 citations · 28 references

Concepts

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