Publication | Closed Access
Formation, etching and electrical characterization of a thermally grown gallium oxide on the Ga-face of a bulk GaN substrate
72
Citations
28
References
2007
Year
Materials ScienceWide-bandgap SemiconductorElectrical EngineeringEngineeringApplied PhysicsElectrical CharacterizationAluminum Gallium NitrideGan Power DeviceGallium OxideCategoryiii-v SemiconductorBulk Gan SubstrateOptoelectronicsGrown Gallium Oxide
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