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Influence of silane flow on MOVPE grown GaN on sapphire substrate by an in situ SiN treatment

Materials EngineeringWide-bandgap SemiconductorChemical EngineeringEngineeringMovpe Grown GanSilane FlowSurface ScienceApplied PhysicsAluminum Gallium NitrideGan Power DeviceSitu Sin TreatmentCategoryiii-v Semiconductor