Anisotropic etching of silicon in hydrazine

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Anisotropic etching of silicon

K.E. Bean · IEEE Transactions on Electron Devices · 1978 · 796 citations

Engineering, Materials Engineering, Materials Science +15

A batch-fabricated silicon accelerometer

L. M. Roylance, James B. Angell · IEEE Transactions on Electron Devices · 1979 · 507 citations

Engineering, Electrical Engineering, Mechanical Engineering +17

Fabrication of novel three-dimensional microstructures by the anisotropic etching of

E. Bassous · IEEE Transactions on Electron Devices · 1978 · 311 citations

Engineering, Materials Engineering, Materials Science +15

A Water-Amine-Complexing Agent System for Etching Silicon

R. M. Finne, D. L. Klein · Journal of The Electrochemical Society · 1967 · 309 citations

Engineering, Materials Engineering, Materials Science +17