Micromilling development and applications for microfabrication

High-resolution focused ion beams

Jon Orloff · Review of Scientific Instruments · 1993 · 344 citations

Engineering, Materials Engineering, Materials Science +10

Development of the micromilling process for high-aspect-ratio microstructures

C. R. Friedrich, M. J. Vasile · Journal of Microelectromechanical Systems · 1996 · 163 citations

Engineering, Manufacturing Engineering, Materials Engineering +15

Energy Dissipation in the Ultraprecision Machining of Copper

D.A. Lucca, Richard L. Rhorer, R. Komanduri · CIRP Annals · 1991 · 157 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +14

Micrometer-scale machining: tool fabrication and initial results

M. J. Vasile, Craig R. Friedrich, Bharath Kikkeri et al. · Precision Engineering · 1996 · 72 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +13

Microfabrication by ion milling: The lathe technique

M. J. Vasile, Christopher J. Biddick, S. A. Schwalm · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 30 citations

Engineering, Manufacturing Engineering, Materials Science +13