Christopher J. Biddick

Microfabrication by ion milling: The lathe technique

M. J. Vasile, Christopher J. Biddick, S. A. Schwalm · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 30 citations

Engineering, Manufacturing Engineering, Materials Science +13

Measurement of the backscatter coefficient using resist response curves for 20–100 keV electron beam lithography on Si

G. P. Watson, Diana Fu, Steven D. Berger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 23 citations

Engineering, Materials Engineering, Materials Science +9

Formation of probe microscope tips in silicon by focused ion beams

M. J. Vasile, Christopher J. Biddick, H. A. Huggins · Applied Physics Letters · 1994 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

SCALPEL proof-of-concept system: preliminary lithography results

W. K. Waskiewicz, Christopher J. Biddick, Myrtle I. Blakey et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 11 citations

Engineering, Manufacturing Engineering, Electronic Materials +11