Fabrication of a miniaturized electron lens system and laser micro-machining condition for silicon membrane

Compression of amplified chirped optical pulses

D. Strickland, G. Mourou · Optics Communications · 1985 · 3.8K citations

Photonics, Engineering, Laser Science +3

Laser ablation and micromachining with ultrashort laser pulses

X. Liu, D. Du, G. Mourou · IEEE Journal of Quantum Electronics · 1997 · 950 citations

Materials Science, Advanced Laser Processing, Engineering +13

Laser-induced breakdown by impact ionization in SiO2 with pulse widths from 7 ns to 150 fs

D. Du, X. Liu, G. Korn et al. · Applied Physics Letters · 1994 · 820 citations · Full text

Optical Materials, Engineering, Laser Science +26

High-intensity laser-induced vaporization and explosion of solid material

F. W. Dabby, Un‐Chul Paek · IEEE Journal of Quantum Electronics · 1972 · 232 citations

Materials Science, Advanced Laser Processing, Engineering +14

Electron-beam microcolumns for lithography and related applications

T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations

Materials Science, Engineering, Electron-beam Lithography +15